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Piezoelectric Micromotors for Microrobots

dc.date.accessioned2004-10-04T14:25:31Z
dc.date.accessioned2018-11-24T10:11:25Z
dc.date.available2004-10-04T14:25:31Z
dc.date.available2018-11-24T10:11:25Z
dc.date.issued1991-02-01en_US
dc.identifier.urihttp://hdl.handle.net/1721.1/5989
dc.identifier.urihttp://repository.aust.edu.ng/xmlui/handle/1721.1/5989
dc.description.abstractBy combining new robot control systems with piezoelectric motors and micromechanics, we propose creating micromechanical systems which are small, cheap and completely autonomous. We have fabricated small - a few millimeters in diameter - piezoelectric motors using ferroelectric thin films and consisting of two pieces: a stator and a rotor. The stationary stator includes a piezoelectric film in which we induce bending in the form of a traveling wave. Anything which sits atop the stator is propelled by the wave. A small glass lens placed upon the stator becomes the spinning rotor. Using thin films of PZT on silicon nitride memebranes, various types of actuator structures have been fabricated.en_US
dc.format.extent20 p.en_US
dc.format.extent3524995 bytes
dc.format.extent1374019 bytes
dc.language.isoen_US
dc.subjectmicromotorsen_US
dc.subjectmicrorobotsen_US
dc.subjectpiezoelectricen_US
dc.subjecttraveling wavesmotorsen_US
dc.subjectultrasonic motorsen_US
dc.subjectgnat robotsen_US
dc.titlePiezoelectric Micromotors for Microrobotsen_US


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