Piezoelectric Micromotors for Microrobots

Unknown author (1991-02-01)

By combining new robot control systems with piezoelectric motors and micromechanics, we propose creating micromechanical systems which are small, cheap and completely autonomous. We have fabricated small - a few millimeters in diameter - piezoelectric motors using ferroelectric thin films and consisting of two pieces: a stator and a rotor. The stationary stator includes a piezoelectric film in which we induce bending in the form of a traveling wave. Anything which sits atop the stator is propelled by the wave. A small glass lens placed upon the stator becomes the spinning rotor. Using thin films of PZT on silicon nitride memebranes, various types of actuator structures have been fabricated.